THREE-DIMENSIONAL MEASUREMENT APPARATUS

专利名称：THREE-DIMENSIONAL MEASUREMENT

APPARATUS

发明人：Tsuyoshi Ohyama,Norihiko Sakaida,Takahiro

Mamiya,Hiroyuki Ishigaki

申请号：US15596788申请日：20170516

公开号：US20170248413A1公开日：20170831

专利附图：

摘要：A measurement apparatus includes an illumination device irradiating an objectwith a first and a second pattern, a camera taking image data of the object, a motor

displacing the object, and a processor measuring the object, obtaining a first value of theobject based on a first number of image data taken with the first pattern at a firstnumber of phases at a first position, obtaining a gain and/or offset based on the firstnumber of image data, obtaining a second value of the object based on the gain and/oroffset and a second number of image data taken with the second pattern at a secondnumber of phases at a second position, obtaining height data of the object based on thefirst and the second value, and obtaining the second value with an average of the gainand/or offset of pixels adjacent to each pixel.

申请人：CKD Corporation

地址：Aichi JP

国籍：JP

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